Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Guissi, SofianeSofianeGuissiClark, WilliamWilliamClarkJuncker, AurélieAurélieJunckerErvin, J.J.ErvinGreiner, K.K.GreinerFried, D.D.FriedBriggs, BasoeneBasoeneBriggsDevriendt, KatiaKatiaDevriendtSebaai, FaridFaridSebaaiCharley, Anne-LaureAnne-LaureCharleyWilson, ChrisChrisWilsonBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28431Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tipProceedings paperhttp://ieeexplore.ieee.org/document/7968952/