Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonators

Barauskas, R.R.BarauskasKausinis, S.S.KausinisTilmans, HarrieHarrieTilmans2021-10-172021-10-1720091392-8716https://imec-publications.be/handle/20.500.12860/14939Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonatorsJournal article