Determination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperatures

Vanstreels, KrisKrisVanstreelsZahedmanesh, HoumanHoumanZahedmaneshVerdonck, PatrickPatrickVerdonckHangen, UdeUdeHangenBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27501Determination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperaturesMeeting abstract