Delabie, AnneliesAnneliesDelabieZhang, HaodongHaodongZhangvan Pelt, ThomasThomasvan PeltGroven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneTomczak, YoannYoannTomczakCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28205Nucleation mechanisms for chemical vapor deposition and atomic layer deposition of 2D semiconductor materialsProceedings paperhttp://eurocvd-balticald2017.se/onewebmedia/EuroCVD_2DMaterials_Delabie.pdf