Horzel, JörgJörgHorzelAllebé, ChristopheChristopheAllebéSzlufcik, JozefJozefSzlufcikSivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththaman2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6405Development of RTP for industrial solar cell processingJournal article