Impurity diffusion from uncoated foreign substrates during high temperature CVD for thin-film Si solar cells

Beaucarne, GuyGuyBeaucarneBourdais, S.S.BourdaisSlaoui, A.A.SlaouiPoortmans, JefJefPoortmans2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4102Impurity diffusion from uncoated foreign substrates during high temperature CVD for thin-film Si solar cellsJournal article