Quantitative measurement of pattern collapse and particle removal force

Kim, Tae-GonTae-GonKimWostyn, KurtKurtWostynMertens, PaulPaulMertensBusnaina, AhmedAhmedBusnainaPark, Jin-GooJin-GooPark2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12399Quantitative measurement of pattern collapse and particle removal forceProceedings paper