Eyben, PierrePierreEybenDe Keersgieter, AnAnDe KeersgieterCelano, UmbertoUmbertoCelanoWouters, LennaertLennaertWoutersChiarella, ThomasThomasChiarellaRitzenthaler, RomainRomainRitzenthalerMertens, HansHansMertensRichard, OlivierOlivierRichardParedis, KristofKristofParedisMatagne, PhilippePhilippeMatagneMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchiGoux, LudovicLudovicGoux2022-11-172022-10-252022-11-172021naWOS:000865945700026https://imec-publications.be/handle/20.500.12860/40612Combining TCAD and advanced metrology techniques to support device integration towards N3Proceedings paper978-4-86348-779-6WOS:000865945700026