Nguyen, M.D.M.D.NguyenNazeer, H.H.NazeerKarakaya, KorayKorayKarakayaPham, S.V.S.V.PhamSteenwelle, R.R.SteenwelleDekkers, M.M.DekkersAbelmann, L.L.AbelmannBlank, M.M.BlankRijnders, G.G.Rijnders2021-10-182021-10-1820100960-1317https://imec-publications.be/handle/20.500.12860/17692Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantileversJournal article