NiO resistive switching material integrated at the bottom of via holes from localized oxidation of nickel metallic layer

Courtade, LoreneLoreneCourtadeMuller, Ch.Ch.MullerTurquat, Ch.Ch.TurquatLisoni, JuditJuditLisoniGoux, LudovicLudovicGouxDeleruyelle, D.D.DeleruyelleWouters, DirkDirkWouters2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15132NiO resistive switching material integrated at the bottom of via holes from localized oxidation of nickel metallic layerOral presentation