Understanding Kinetics of Defect Annihilation in Chemoepitaxy-Directed Self-Assembly

Li, JiajingJiajingLiRincon Delgadillo, PaulinaPaulinaRincon DelgadilloSuh, Hyo SeonHyo SeonSuhMannaert, GeertGeertMannaertNealey, PaulPaulNealey2023-01-052021-11-022023-01-0520211944-8244WOS:000659315800097https://imec-publications.be/handle/20.500.12860/37861Understanding Kinetics of Defect Annihilation in Chemoepitaxy-Directed Self-AssemblyJournal article10.1021/acsami.1c03830WOS:000659315800097BLOCK-COPOLYMERSCHEMICAL-PATTERNSTHERMODYNAMICSDEPENDENCEFILMSTHINMEDLINE:34004117