Nanoscale imaging and metrology of devices and innovative materials

Spinella, C.C.SpinellaRaineri, V.V.RaineriVandervorst, WilfriedWilfriedVandervorstCiappa, M.M.Ciappa2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12936Nanoscale imaging and metrology of devices and innovative materialsJournal article