High-Throughput Nanopore Fabrication and Classification Using Xe-Ion Irradiation and Automated Pore-Edge Analysis

Macha, MichalMichalMachaMarion, SanjinSanjinMarionTripathi, MukeshMukeshTripathiThakur, MukeshchandMukeshchandThakurLihter, MartinaMartinaLihterKis, AndrasAndrasKisSmolyanitsky, AlexAlexSmolyanitskyRadenovic, AleksandraAleksandraRadenovic2023-04-272022-10-102023-04-2720221936-0851WOS:000862394800001https://imec-publications.be/handle/20.500.12860/40546High-Throughput Nanopore Fabrication and Classification Using Xe-Ion Irradiation and Automated Pore-Edge AnalysisJournal article10.1021/acsnano.2c05201WOS:000862394800001MOS2FIELDSELECTIVITYMEDLINE:36153997