Roughness smoothing of BCP patterns with sequential infiltration synthesis

Singh, ArjunArjunSinghChan, BTBTChanGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25916Roughness smoothing of BCP patterns with sequential infiltration synthesisOral presentationhttp://www.dsasymposium.org/index.php/program/dsa-proceedings