The Shear test as interface characterization tool applied to the Si-BCB interface

Degryse, DominiekDominiekDegryseVandevelde, BartBartVandeveldeBeyne, EricEricBeyneDegrieck, JorisJorisDegrieck2021-10-172021-10-1720091043-7398https://imec-publications.be/handle/20.500.12860/15213The Shear test as interface characterization tool applied to the Si-BCB interfaceJournal article