High-Endurance Ferroelectric (La, Y) and (La, Gd) Co-Doped Hafnium Zirconate Grown by Atomic Layer Deposition

Popovici, Mihaela IoanaMihaela IoanaPopoviciWalke, AmeyAmeyWalkeBizindavyi, JasperJasperBizindavyiMeersschaut, JohanJohanMeersschautBanerjee, KaustuvKaustuvBanerjeePotoms, GoedeleGoedelePotomsKatcko, KostantineKostantineKatckoVan den Bosch, GeertGeertVan den BoschDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKarVan Houdt, JanJanVan Houdt2023-01-032022-06-022023-01-0320222637-6113WOS:000795902800047https://imec-publications.be/handle/20.500.12860/39916High-Endurance Ferroelectric (La, Y) and (La, Gd) Co-Doped Hafnium Zirconate Grown by Atomic Layer DepositionJournal article10.1021/acsaelm.2c00063WOS:000795902800047FIELD-CYCLING BEHAVIORTHIN-FILMSPOLARIZATIONOPERATIONPHASEOXIDEZRO2