Electrical and structural properties of oxygen-precipitation induced extended defects in silicon

Claeys, C.C.ClaeysSimoen, EddyEddySimoenVanhellemont, JanJanVanhellemont2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1772Electrical and structural properties of oxygen-precipitation induced extended defects in siliconJournal article