Kittl, JorgeJorgeKittlPawlak, MalgorzataMalgorzataPawlakTorregiani, CristinaCristinaTorregianiLauwers, AnneAnneLauwersDemeurisse, CarolineCarolineDemeurisseVrancken, ChristaChristaVranckenAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansDetavernier, ChristopheChristopheDetavernierJordan-Sweet, JeanJeanJordan-SweetLavoie, ChristianChristianLavoie2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12407Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurementsJournal article