Characterization of a thermal freeze LLE double patterning process for predictive simulation

Robertson, StewartStewartRobertsonWong, PatrickPatrickWongBiafore, JohnJohnBiaforeVandenbroeck, NadiaNadiaVandenbroeckWiaux, VincentVincentWiaux2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17886Characterization of a thermal freeze LLE double patterning process for predictive simulationProceedings paper