Sputter rate variations in silicon under high k dielectric films

Benett, JoeJoeBenettVandervorst, WilfriedWilfriedVandervorstBeebe, M.M.BeebeSparks, C.C.SparksGondran, C.C.Gondran2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7199Sputter rate variations in silicon under high k dielectric filmsMeeting abstract