Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials

Verdonck, PatrickPatrickVerdonckDe Roest, DavidDavidDe RoestKaneko, ShinyaShinyaKanekoTsuji, NaotoNaotoTsujiMatsushita, KiyohiroKiyohiroMatsushitaTravaly, YoussefYoussefTravalySprey, HesselHesselSpreySchaekers, MarcMarcSchaekersBeyer, GeraldGeraldBeyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13169Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materialsProceedings paper