Integration of III-V on Si for high-mobility CMOS

Waldron, NiamhNiamhWaldronMerckling, ClementClementMercklingTeugels, LieveLieveTeugelsSebaai, FaridFaridSebaaiBarla, KathyKathyBarlaCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26155Integration of III-V on Si for high-mobility CMOSProceedings paper