Gencarelli, FedericaFedericaGencarelliVincent, BenjaminBenjaminVincentDe Meulemeester, JelleJelleDe MeulemeesterVantomme, AndreAndreVantommeLoo, RogerRogerLooCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-192021-10-192011-09https://imec-publications.be/handle/20.500.12860/18944Low temperature chemical vapor deposition of epitaxial GeSn with high substitutional Sn contentMeeting abstract