Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

Wan, DannyDannyWanCouet, SebastienSebastienCouetPiao, XiaoyuXiaoyuPiaoSouriau, LaurentLaurentSouriauCanvel, YannYannCanvelTsvetanova, DianaDianaTsvetanovaVangoidsenhoven, DizianaDizianaVangoidsenhovenThiam, ArameArameThiamPacco, AntoineAntoinePaccoPotocnik, AntonAntonPotocnikMongillo, MassimoMassimoMongilloIvanov, TsvetanTsvetanIvanovJussot, JulienJulienJussotVerjauw, JeroenJeroenVerjauwAcharya, RohithRohithAcharyaLazzarino, FredericFredericLazzarinoGovoreanu, BogdanBogdanGovoreanuRadu, IulianaIulianaRadu2022-03-012022-03-0120210021-4922WOS:000623859500001https://imec-publications.be/handle/20.500.12860/39195Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafersJournal article10.35848/1347-4065/abe5bbWOS:000623859500001