Enhanced nucleation of Ni nanoparticles on TiN through H3BO3-mediated growth inhibition

Vanpaemel, JohannesJohannesVanpaemelvan der Veen, MarleenMarleenvan der VeenDe Gendt, StefanStefanDe GendtVereecken, PhilippePhilippeVereecken2021-10-212021-10-2120130013-4686https://imec-publications.be/handle/20.500.12860/23303Enhanced nucleation of Ni nanoparticles on TiN through H3BO3-mediated growth inhibitionJournal articlehttp://www.sciencedirect.com/science/article/pii/S0013468613013807