Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection

Dey, BappadityaBappadityaDeyWu, StewartStewartWuDas, SayantanSayantanDasKhalil, KasemKasemKhalilHalder, SandipSandipHalderLeray, PhilippePhilippeLeraySamir, BhamidipatiBhamidipatiSamirAhi, KiarashKiarashAhiPereira, MarkMarkPereiraFenger, GermainGermainFengerBayoumi, Magdy A.Magdy A.Bayoumi2022-07-112022-05-222022-07-082022-07-112021978-1-5106-4552-30277-786XWOS:000792657300017https://imec-publications.be/handle/20.500.12860/39878Unsupervised Machine Learning based SEM Image Denoising for robust Contour DetectionProceedings paper10.1117/12.2600945978-1-5106-4553-0WOS:000792657300017