Elsmore, ChrisChrisElsmoreMeuris, MarcMarcMeurisMertens, PaulPaulMertensHurd, TraceTraceHurdHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/641Development of an environmentally-friendly HCl gas-phase cleanProceedings paper