Jourdain, AnneAnneJourdainRottenberg, XavierXavierRottenbergCarchon, GeertGeertCarchonTilmans, HarrieHarrieTilmans2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7711Optimization of 0-level packaging for RF-MEMS devicesProceedings paper