In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction

Nguyen, DuyDuyNguyenLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyVan Daele, BennyBennyVan DaeleRyan, PaulPaulRyanWormington, MatthewMatthewWormingtonHopkins, JohnJohnHopkins2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12613In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffractionProceedings paperhttp://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000010000001000151000001&idtype=cvips&gifs=Yes