Internal matrix structure of low-k nanoporous silica and its relation to mechanical properties

Saxena, R.R.SaxenaRodriguez, O.O.RodriguezCho, W.W.ChoGills, W.N.W.N.GillsPlawsky, J.L.J.L.PlawskyBaklanov, MikhaïlMikhaïlBaklanovMogilnikov, K.P.K.P.Mogilnikov2021-10-152021-10-152004-12https://imec-publications.be/handle/20.500.12860/9555Internal matrix structure of low-k nanoporous silica and its relation to mechanical propertiesJournal article