Mehendale, ManjushaManjushaMehendaleAntonelli, AndyAndyAntonelliMair, RobinRobinMairMukundhan, PriyaPriyaMukundhanBogdanowicz, JanuszJanuszBogdanowiczBlanco, VictorVictorBlancoCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLeray2023-06-152022-09-082023-06-152022978-1-5106-4981-10277-786XWOS:000844549800037https://imec-publications.be/handle/20.500.12860/40379Imaging of buried overlay and alignment markers using picosecond acoustic microscopyProceedings paper10.1117/12.2614295978-1-5106-4982-8WOS:000844549800037