de Kruif, RobRobde KruifDavydova, NataliaNataliaDavydovaConnolly, BridBridConnollyFukugami, NorihitoNorihitoFukugamiLammers, AdAdLammersPhilipsen, VickyVickyPhilipsenKondo, ShinpeiShinpeiKondoVan Setten, EelcoEelcoVan SettenVaenkatesan, VidyaVidyaVaenkatesanZimmerman, JohnJohnZimmermanHarned, NoreenNoreenHarned2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20547Impact of an etched EUV mask black border on imaging and overlayOral presentationhttps://www.sematech.org/10258