Comparison of an L-array and a single transistor method to extract Leff and Rs in deep submicron MOSFETs

Biesemans, SergeSergeBiesemansDe Meyer, KristinKristinDe Meyer2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1736Comparison of an L-array and a single transistor method to extract Leff and Rs in deep submicron MOSFETsProceedings paper