A new route for fabricating strained Ge-based pMOSFETs

Vincent, BenjaminBenjaminVincentLoo, RogerRogerLoo2021-10-202021-10-202012-01https://imec-publications.be/handle/20.500.12860/21805A new route for fabricating strained Ge-based pMOSFETsJournal articlehttp://chipdesignmag.com/display.php?articleId=5082&issueId=46