Oscilator-based volatile detection system using doubly-clamped micromechanical resonators

Patrascu, MihaiMihaiPatrascuPettine, JuliaJuliaPettineKarabacak, DevrezDevrezKarabacakVandecasteele, MarianneMarianneVandecasteeleBrongersma, SywertSywertBrongersmaCrego Calama, MercedesMercedesCrego Calama2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19549Oscilator-based volatile detection system using doubly-clamped micromechanical resonatorsProceedings paper