Shamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivTokei, ZsoltZsoltTokeiBoullart, WernerWernerBoullart2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11194Influence of TaN microstructure on its etch propertiesMeeting abstract