Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidLorusso, GianGianLorussoYounkin, ToddToddYounkinPei-Yang, YanYanPei-YangLeeson, MichaelMichaelLeeson2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21660Mask roughness effects on pattern variabilityOral presentationhttps://www.sematech.org/10258/proceedings.htm