Teugels, LieveLieveTeugelsOng, PatrickPatrickOngUsman Ibrahim, AnsarAnsarUsman IbrahimDelande, TinneTinneDelandeBhonsle, RithuRithuBhonsleSiebert, MaxMaxSiebertGarcia Romero, IvanIvanGarcia RomeroStruyf, HerbertHerbertStruyfLeunissen, LeonardusLeonardusLeunissen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27390An improved CMP process for integration of high mobility channel materialsProceedings paper