Correlation between haze of the wafer and particle-count on wafers: a new approach to monitor nano-sized particles

Xu, KaidongKaidongXuVos, RitaRitaVosVereecke, GuyGuyVereeckeLux, MarcelMarcelLuxFyen, WimWimFyenHolsteyns, FrankFrankHolsteynsKenis, KarineKarineKenisMertens, PaulPaulMertensHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7067Correlation between haze of the wafer and particle-count on wafers: a new approach to monitor nano-sized particlesOral presentation