Application of selective epitaxial growth in the sub 20 nm FinFET device fabrication

Hikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelEneman, GeertGeertEnemanFavia, PaolaPaolaFaviaLoo, RogerRogerLoo2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23937Application of selective epitaxial growth in the sub 20 nm FinFET device fabricationProceedings paperhttp://ecst.ecsdl.org/content/60/1/497.abstract