Microstructural characterization of side walls in SBT 3D capacitors

Menou, N.N.MenouGoux, LudovicLudovicGouxLisoni, JuditJuditLisoniSchwitters, M.M.SchwittersTurquat, Ch.Ch.TurquatMadigou, V.V.MadigouHodeau, J-L.J-L.HodeauMuller, Ch.Ch.MullerWouters, DirkDirkWouters2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9285Microstructural characterization of side walls in SBT 3D capacitorsOral presentation