Kim, Tae-GonTae-GonKimWostyn, KurtKurtWostynBearda, TwanTwanBeardaPark, J.-G.J.-G.ParkMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15597Investigation of physical cleaning process window by atomic force microscopeProceedings paper