Study of out-of-plane mechanical stress impact on Si BJT and diffusion resistor using in-situ nanoindentation probing

Liu, YefanYefanLiuHiblot, GaspardGaspardHiblotFuruhashi, TakahisaTakahisaFuruhashiLin, HeshengHeshengLinVelenis, DimitriosDimitriosVelenisDe Wolf, IngridIngridDe Wolf2021-10-272021-10-2720190026-2714https://imec-publications.be/handle/20.500.12860/33461Study of out-of-plane mechanical stress impact on Si BJT and diffusion resistor using in-situ nanoindentation probingJournal articlehttps://doi.org/10.1016/j.microrel.2019.06.059