Cowern, NickNickCowernCacciato, A.A.CacciatoCuster, J. S.J. S.CusterSaris, F. W.F. W.SarisVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1139Role of C and B clusters in transient diffusion of B in siliconJournal article