Mannaert, GeertGeertMannaertSchram, TomTomSchramOrtolland, ClaudeClaudeOrtollandDemand, MarcMarcDemandSonnemans, RogerRogerSonnemansBerry, IvanIvanBerry2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19376Optimization of post ion implant ash plasma and clean for ultra shallow extension/halo implantationMeeting abstracthttp://www.pesm2011.be/Pesm2011/online_presentations_5may.html