Reliability study of liner/barrier/seed options for via-middle TSV's with 3m diameter and below

Li, YunlongYunlongLiVan Huylenbroeck, StefaanStefaanVan HuylenbroeckRoussel, PhilippePhilippeRousselBrouri, MohandMohandBrouriGopinath, SanjaySanjayGopinathAnjos, Daniela M.Daniela M.AnjosThorum, MatthewMatthewThorumYu, JengyiJengyiYuBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneCroes, KristofKristofCroes2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25559Reliability study of liner/barrier/seed options for via-middle TSV's with 3m diameter and belowProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325592