Conard, ThierryThierryConardFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoOp de Beeck, JonathanJonathanOp de BeeckCelano, UmbertoUmbertoCelanoVandervorst, WilfriedWilfriedVandervorstMoeler, RudolfRudolfMoelerLabyedh, NouhaNouhaLabyedhVereecken, PhilippePhilippeVereecken2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28054Combined in-situ scanning force microscopy/TOFSIMS and FIB-TOFSIMS analysis: towards 3D chemical analysisMeeting abstract