Vermang, BartBartVermangGoverde, HansHansGoverdeSimons, VeerleVeerleSimonsDe Wolf, IngridIngridDe WolfMeersschaut, JohanJohanMeersschautTanaku, ShujiShujiTanakuJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21788A study of blister formation in ALD Al2O3 grown on siliconProceedings paper