Levrau, ElisabethElisabethLevrauDevloo-Casier, KilainKilainDevloo-CasierDendooven, JolienJolienDendoovenLudwig, KarlKarlLudwigVerdonck, PatrickPatrickVerdonckMeersschaut, JohanJohanMeersschautBaklanov, MikhaïlMikhaïlBaklanovDetavernier, ChristopheChristopheDetavernier2021-10-212021-10-2120130743-7463https://imec-publications.be/handle/20.500.12860/22675Atomic layer deposition of TiO2 on surface modified nanoporous low-k filmsJournal articlehttp://pubs.acs.org/doi/abs/10.1021/la4027738