FABRICATION AND CHARACTERIZATION OF LARGE-AREA FLEXIBLE CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS

Halbach, ChloeChloeHalbachSegers, JeremyJeremySegersRochus, VeroniqueVeroniqueRochusGeorgitzikis, EpimitheasEpimitheasGeorgitzikisHeremans, PaulPaulHeremansCheyns, DavidDavidCheyns2024-08-292024-04-142024-08-2920241084-6999WOS:001174201100242https://imec-publications.be/handle/20.500.12860/43828FABRICATION AND CHARACTERIZATION OF LARGE-AREA FLEXIBLE CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERSProceedings paper10.1109/MEMS58180.2024.10439526979-8-3503-5792-9WOS:001174201100242